Publication | Closed Access
Microwave dielectric properties of the BaTi5O11 thin film grown on the poly-Si substrate using rf magnetron sputtering
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Citations
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References
2005
Year
Materials ScienceElectrical EngineeringEngineeringApplied PhysicsBati5o11 Thin FilmRf Magnetron SputteringThin FilmsMicrowave Dielectric PropertiesMicroelectronicsMicrowave EngineeringThin Film ProcessingElectrical Insulation
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