Fabrication of a planar grating spectrograph by deep-etch lithography with synchrotron radiation - Concepedia

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Fabrication of a planar grating spectrograph by deep-etch lithography with synchrotron radiation

43

Citations

8

References

1991

Year

J. J. Mohr, B. Anderer, W. Ehrfeld

Sensors and Actuators A Physical

Transient GratingPhotonicsEngineeringElectron-beam LithographyBeam LithographyOptical PropertiesGratingsApplied PhysicsDeep-etch LithographySynchrotron RadiationNanolithography MethodDiffractive Optic

References

	Year	Citations

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