The performance of capacitive ultrasonic transducers using v-grooved backplates

Abstract

Capacitive transducers provide a means of coupling ultrasound efficiently into air. Many investigations of these transducers have been reported but none have provided a reliable means of producing a transducer resonating at a specific frequency. The authors describe the performance of capacitive transducers constructed with v-groove backplates and membranes of varying thicknesses, and give design criteria for producing transducers at well defined frequencies.