Characterization of the impact of plasma treatments and wet cleaning on a porous low k material - Concepedia

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Characterization of the impact of plasma treatments and wet cleaning on a porous low k material

25

Citations

6

References

2006

Year

W. Puyrenier, V. Rouessac, Lucile Broussous, Diane Rébiscoul, A. Ayral

Microelectronic Engineering

Materials ScienceChemical EngineeringEngineeringCorrosionSurface ScienceWater TreatmentWet CleaningGas Discharge PlasmaNonthermal PlasmaPlasma ApplicationPlasma TreatmentsPlasma Processing

References

	Year	Citations

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