Influence of thickness on the crystallography and surface topography of TiN nano-films deposited by reactive DC and pulsed magnetron sputtering - Concepedia

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Influence of thickness on the crystallography and surface topography of TiN nano-films deposited by reactive DC and pulsed magnetron sputtering

20

Citations

12

References

2012

Year

I. Iordanova, Peter Kelly, M. Burova, Andreana Andreeva, B. Stefanova

Thin Solid Films

Materials ScienceEngineeringNanomaterialsNanotechnologyNanostructured SurfaceSurface ScienceApplied PhysicsMagnetron SputteringSurface TopographyReactive DcThin Film Processing

References

	Year	Citations

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