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<title>Status Of The Sputtered Sliced Zone Plates For X-Ray Microscopy</title>
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1982
Year
Optical MaterialsEngineeringMicroscopyOptic DesignOptical TestingX-ray ImagingResolution RangeOptical PropertiesX-ray TechnologyZone PlatesInstrumentationOptical SystemsRadiologyHealth SciencesPhotonicsPhysicsInternational SocietyX-ray MicroscopyOptical ComponentsX-ray DiffractionApplied PhysicsOptical EngineeringX-ray OpticDiffractive Optic
Procedures are described to make sputtered sliced zone plates. These systems are under development for a resolution range of 10 nm ≤ d ≤ 50 nm.© (1982) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.