Sensors and Actuators B Chemical · 1995 · 61 citations · 10 references
Natural SciencesMaterials EngineeringMaterials ScienceCeramic MaterialsSensorsThin FilmsElectrical Properties Of CeramicsHumidity SensorsRelative HumidityTemperature MeasurementTemperature SensorsThin Film Electrical PropertiesElectrical PropertiesHumidity Sensing MaterialsHumidity Sensor MaterialsTemperature Dependence Of Electrical PropertiesThin-film Humidity SensorsThin-film Sensor MaterialsThin-film Sensors
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