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A numerical study of residual stress induced in machined silicon surfaces by molecular dynamics simulation

EngineeringMechanical EngineeringMaterial SimulationMolecular Dynamics SimulationResidual StressComputational MechanicsNanotribologyMolecular DynamicsMachined Silicon SurfacesMechanicsNumerical SimulationNanoscale ModelingPhysicsSolid MechanicsSilicon DebuggingSurface ScienceApplied PhysicsMaterial ModelingMechanics Of Materials