Publication | Closed Access
NanoSIMS Analysis of Trace Element Segregation during the Al-Si Eutectic Reaction
17
Citations
4
References
2007
Year
Materials ScienceMaterials EngineeringAluminium NitrideEngineeringNanotechnologyNanosims AnalysisAl-si Eutectic ReactionTrace Element SegregationSemiconductor Device FabricationChemistrySilicon On Insulator
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