Publication | Closed Access
The effects of Si incorporation on the electrochemical and nanomechanical properties of DLC thin films
188
Citations
28
References
2002
Year
Materials ScienceEngineeringSi IncorporationFlexible ElectronicsSilicon On InsulatorApplied PhysicsSiliceneNanomechanical PropertiesThin FilmsChemical Vapor DepositionDlc Thin FilmsThin Film Processing
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