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X-ray residual stress measurement in TiN, ZrN and HfN films using the Seemann-Bohlin method

Materials EngineeringMaterials ScienceX-ray SpectroscopyEngineeringCorrosionSurface ScienceApplied PhysicsX-ray DiffractionResidual StressHfn FilmsThin Film ProcessingMicrostructureX-ray FluorescenceSeemann-bohlin Method