Erosion of Silicon Single Crystals

Abstract

The erosion of Si single crystals by angular Al 2 O 3 particles was investigated over a range of particle diameters D (23 to 270 μm), velocities v (32 to 134 m/s), and impact angles α (22° to 90°). For α≥45°, the steady‐state erosion rate can be described within the framework of existing models by the modified relation ΔW∞( v sin α‐ v 0 ) 2.6 ( D‐D 0 ) 0.6 . The results are consistent with the relation D 0 v = Dv 0 2200 × 10 −6 m 2 /s for the threshold values D 0 and v 0 . For α=22°, another term must be added, and could represent a contribution of plasticity. The results also indicate that surface morphology and/or subsurface‐damage structures are important.