Japanese Journal of Applied Physics · 1998 · 19 citations · 3 references
EngineeringMaterials SciencePhysicsOpticsSurface EngineeringSurface ScienceEtching ProcessesLaser Material ProcessingLaser Surface ProcessingSurface DegradationSurface ModificationSurface RoughnessDamage ThresholdsEtchingGlass EtchingIon Beam EtchingLaser ThresholdMagnetron SputteringSurface Coatings On GlassSurface Etching
Subsurface damage incurred during optical polishing, which is known to lower the laser damage thresholds of fused silica surfaces, was studied. Ceria in subsurface fissures was completely removed (depths up to one thousand Å) using rf-magnetron sputtering without degrading surface roughness. The laser-induced damage threshold of the optical coating deposited on an ion-etched surface was improved by a factor of two compared to that on an unprocessed surface.
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