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Gas pressures influence on the optical and mechanical properties of Ta 2 O 5 films produced by reactive low voltage ion plating (RLVIP)

Materials ScienceMaterials EngineeringOptical MaterialsEngineeringOptical PropertiesSurface ScienceApplied PhysicsPulsed Laser DepositionTa 2Vacuum DeviceThin FilmsO 5Chemical Vapor DepositionThin Film ProcessingGas Pressures Influence