The influence of excimer laser treatment on an aluminium alloy surface

An x‐ray photoelectron spectroscopy study of poly(methylmethacrylate) and poly(α‐methylstyrene) surfaces irradiated by excimer lasers

Michael C. Burrell, Y. S. Liu, H. S. Cole · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 44 citations

X-ray Crystallography, Optical Materials, X-ray Spectroscopy +20

Ultraviolet light stimulated thermal oxidation of silicon

E. M. Young, William A. Tiller · Applied Physics Letters · 1987 · 34 citations

Ultraviolet Light, Photonics, Optical Materials +15

Microstructure of dielectric thin films formed by e-beam coevaporation

E. N. Farabaugh, Dean Sanders · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1983 · 32 citations

Materials Science, Optical Materials, Engineering +14

ArF excimer laser induced CVD of aluminum oxide films

Makoto Minakata, Yoshitaka Furukawa · Journal of Electronic Materials · 1986 · 15 citations

Materials Science, Engineering, Applied Physics +5