Piezoelectricity of <i>c</i>-axis oriented PbTiO3 thin films

Abstract

Through seeded lateral overgrowth, c-axis oriented PbTiO3 films are formed on patterned Pt electrode films that are on a SrTiO3 single crystal. The impedance characteristics are then measured for this sample as if it were a composite bulk wave resonator. A series of resonance and antiresonance characteristics is observed. Using a conventional circuit model, the electrical impedance is analyzed to evaluate the electromechanical coupling constant kt of the PbTiO3 films. It is found that kt is as large as 0.8.