Publication | Closed Access
Properties of hydrogenated carbon films produced by reactive magnetron sputtering
31
Citations
11
References
1981
Year
Materials ScienceEngineeringGlassy CarbonCarbon-based MaterialPorous CarbonNanoelectronicsApplied PhysicsGrapheneActivated CarbonHydrogenCarbon-based FilmsReactive Magnetron SputteringPyrolytic Carbon
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