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Thin films in the integrated circuit industry: requirements and deposition methods

Materials ScienceEngineeringThin-film FabricationApplied PhysicsIntegrated Circuit IndustryDeposition MethodsSemiconductor Device FabricationIntegrated CircuitsThin Film Process TechnologyThin FilmsElectronic PackagingMicroelectronicsChemical DepositionChemical Vapor DepositionThin Film Processing