Commissioning of a Soft X-ray Beamline PF-BL-16A with a Variable-Included-Angle Varied-Line-Spacing Grating Monochromator

Abstract

The design and commissioning of a new soft X‐ray beamline, BL‐16A, at the Photon Factory is presented. The beamline consists of a pre‐focusing mirror, an entrance slit, a variable‐included‐angle varied‐line‐spacing plane grating monochromator, and a post‐focusing system as usual, and provides circularly and linearly polarized soft X rays in the energy range 200–1500 eV with an APPLE‐II type undulator. The commissioning procedure for the beamline optics is described in detail, especially the check of the focal position for the zero‐th order and diffracted X rays.