Multilevel structures in sol-gel thin films with a single UV-exposure using a gray-scale mask - Concepedia

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Multilevel structures in sol-gel thin films with a single UV-exposure using a gray-scale mask

17

Citations

5

References

1999

Year

Pekka Äyräs, Juhani Rantala, R. C. Levy, Michael R. Descour, Seppo Honkanen, N. Peyghambarian

Thin Solid Films

Materials ScienceSol-gel Thin FilmsEngineeringOptical PropertiesSurface ScienceApplied PhysicsMultilevel StructuresThin FilmsGray-scale MaskThin Film ProcessingSol-gel Synthesis

References

	Year	Citations

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