Effects of substrate cleaning and film thickness on the epitaxial growth of ultrahigh vacuum deposited Cu thin films on (001)Si - Concepedia

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Effects of substrate cleaning and film thickness on the epitaxial growth of ultrahigh vacuum deposited Cu thin films on (001)Si

24

Citations

17

References

1996

Year

C.S. Liu, L.J. Chen

Applied Surface Science

Materials ScienceEpitaxial GrowthEngineeringFilm ThicknessSurface ScienceApplied PhysicsVacuum DeviceThin FilmsCu Thin FilmsChemical Vapor DepositionThin Film Processing

References

	Year	Citations

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