Uniform diamond coatings on 4 in Si wafers - Concepedia

Concepedia

Publication | Closed Access

Uniform diamond coatings on 4 in Si wafers

12

Citations

6

References

1993

Year

Caitlin Mueller, W. Haenni, M. Binggeli, H.E. Hintermann

Diamond and Related Materials

Materials EngineeringDiamond-like CarbonMaterials ScienceWafer Scale ProcessingEngineeringSemiconductor Device FabricationUniform Diamond Coatings

References

	Year	Citations

Page 1