Observation of three-dimensional elemental distributions of a Si device using a 360°-tilt FIB and the cold field-emission STEM system - Concepedia

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Observation of three-dimensional elemental distributions of a Si device using a 360°-tilt FIB and the cold field-emission STEM system

57

Citations

26

References

2008

Year

Toshie Yaguchi, Mitsuru KONNO, Takeo Kamino, Masashi Watanabe

Ultramicroscopy

Si DevicePhysicsInstrument ScienceApplied Physics360°-Tilt FibSemiconductor Device FabricationInstrumentationElectronic InstrumentationSilicon On InsulatorThree-dimensional Elemental Distributions

References

	Year	Citations

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