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Stranski-Krastanow growth of tensile strained Si islands on Ge (001)
31
Citations
18
References
2007
Year
EngineeringSevere Plastic DeformationStranski-krastanow Island GrowthSilicon On InsulatorMicrostructure-strength RelationshipMolecular Beam EpitaxyEpitaxial GrowthTruncated PyramidsMaterials EngineeringMaterials ScienceStrain LocalizationStrained GeSemiconductor Device FabricationMicroelectronicsMicrostructureDislocation InteractionApplied PhysicsSi IslandsMechanics Of MaterialsHigh Strain Rate
Stranski-Krastanow island growth is demonstrated for tensile strained silicon epilayers on Ge (001) substrates over a wide range of growth temperatures. Small, Si-rich islands show sidewall faces near {1,1,10}, whereas larger islands are {113}-terminated truncated pyramids with an aspect ratio near 0.1. In contrast to compressively strained Ge on Si, we find for Si on Ge a significantly thicker wetting layer of >8 ML and coexistence of islands and dislocations.
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