Vibrational kinetics, electron dynamics and elementary processes in H₂and D₂plasmas for negative ion production: modelling aspects

Abstract

We report current and past efforts made by our group in the ab initio modelling of different negative ion sources.
\nIn particular, we discuss the cross sections of elementary processes relevant to negative ion kinetics, including
\nelectron/molecule, atom/molecule and atom/molecule gas surface interactions, particularly emphasizing the role
\nof vibrational excitation in affecting the cross sections. Attention is also paid to the elementary processes involving caesium in both volume and surface sources.
\nSelf-consistent models, which couple the Boltzmann equation and the vibrational kinetics, are used for describing
\nmultipole and rf discharges, while a PIC-MC (particle in cell) with Monte Carlo collisions is used to study electron and ion dynamics in a parallel plate reactor in the post-discharge regime. The present theoretical results should encourage further dedicated experimental work in the field.