Planar microtransformer with monolithically-integrated rectifier diodes for micro-switching converters

Abstract

A microtransformer that is monolithically integrated with rectifier diodes is developed as the first step towards developing a monolithic microswitching converter that can be integrated with semiconductor devices and magnetic components. This microtransformer consists of planar coils and CoZrRe amorphous magnetic layers on Si substrate. Two Schottky barrier diodes are formed on the Si substrate and directly connected to the secondary coil. This microtransformer chip is shown to perform both conversion and rectifying functions.