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Athermal crystallization induced by electronic excitations in ion-irradiated silicon carbide
107
Citations
24
References
2006
Year
Materials ScienceMaterials EngineeringRoom TemperatureAthermal CrystallizationEngineeringIon ImplantationPhysicsApplied PhysicsAtomic PhysicsIon BeamNuclear Energy LossIon EmissionSilicon On InsulatorMicroelectronicsSwift Heavy IonsCarbide
Silicon carbide single crystals were irradiated at room temperature with low energy I ions and high energy Pb ions. It is found that the damaged layer formed by the elastic collisions generated during low energy I ion irradiation can readily be removed by the electronic excitations induced by swift Pb ions. This effect occurs at a temperature quite below that at which the conventional ion-beam induced crystallization process is generally achieved by nuclear energy loss. This finding is interesting both from a fundamental point of view for the understanding of the interaction of swift heavy ions with solids and for a large number of technological applications.
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