IBM Journal of Research and Development · 1978 · 18 citations · 3 references
Natural SciencesMaterials EngineeringMaterials ScienceSurface ChemistrySurface EngineeringSurface SciencePlasma FundamentalsPlasma Surface TreatmentPlasma-surface InteractionsImpuritiesImpurity ControlPlasma Display PanelsPlasma OxidationPlasma-assisted OxidationPlasma-induced Surface DamagePlasma-surface ReactionsReactive Gas Chemistry
Experimental results are presented for the influence of controlled levels of important reactive impurities (N <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf> , O <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf> , H <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf> O, CO <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf> ) on the aging characteristics of the operating voltages of ac plasma display panels. Details are also given of a novel method of modifying the electronic properties of MgO surfaces by discharge processing in an oxygen-doped Ne-0.1% Ar Penning mixture.
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