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Correlations between electronic structure of transition metal atoms and performance of high-k gate dielectrics in advanced Si devices

Electrical EngineeringEngineeringPhysicsNanoelectronicsCondensed Matter PhysicsApplied PhysicsAdvanced Si DevicesSemiconductor MaterialTransition Metal AtomsSemiconductor Device FabricationSilicon On InsulatorMicroelectronicsElectronic StructureSemiconductor Device