Formation of TiN, TiC and TiCN by metal plasma immersion ion implantation and deposition - Concepedia

Concepedia

Publication | Closed Access

Formation of TiN, TiC and TiCN by metal plasma immersion ion implantation and deposition

55

Citations

24

References

2003

Year

Peter Huber, D. Manova, S. Mändl, B. Rauschenbach

Surface and Coatings Technology

Materials ScienceMaterials EngineeringIon ImplantationEngineeringPowder MetallurgyCorrosionSurface ScienceApplied PhysicsChemical DepositionChemical Vapor DepositionPlasma Processing

References

	Year	Citations

Page 1