Publication | Closed Access
The Effect of AlN Nucleation Temperature on the Growth of AlN Films via Metalorganic Chemical Vapor Deposition
31
Citations
20
References
2011
Year
Materials ScienceAln FilmsAluminium NitrideEngineeringAln Nucleation TemperatureSurface ScienceApplied PhysicsChemistryChemical DepositionChemical Vapor DepositionThin Film ProcessingMicrostructure
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