Thin Solid Films · 1994 · 88 citations · 17 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSurface ScienceThin FilmsAluminum OxidesMetal OxidesOxide SemiconductorsThin Film Electrical PropertiesThin-film DepositionThin-film MaterialsAluminum-doped Zinc OxideMagnetron SputteringSputteringTextured MaterialsTextured SurfacesTransparent Conducting FilmsTransparent Conducting MaterialsTransparent Conductive Oxides
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