The interaction of chlorine with indium phosphide surfaces

Abstract

The adsorption and reaction of chlorine with clean cleaved (110) faces of indium phosphide crystals has been investigated by a range of electron spectroscopic techniques. For low exposures the chlorine is relatively weakly bound but for high exposure reaction with the surface leads to corrosion, the removal of some phosphorus from the surface layers, and the creation of a disordered surface. Work functions and electron affinities have been established and the behaviour of Schottky barriers formed at metal-indium phosphide interfaces are discussed in the light of these findings.