Publication | Closed Access
Effect of rapid thermal annealing on Si rich SiO2 films prepared using atom beam sputtering technique
15
Citations
26
References
2009
Year
Materials ScienceMaterials EngineeringEngineeringNanoelectronicsApplied PhysicsSemiconductor Device FabricationThin FilmsSilicon On InsulatorMicroelectronicsChemical Vapor DepositionThin Film Processing
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