Effect of rapid thermal annealing on Si rich SiO2 films prepared using atom beam sputtering technique

T.N. Warang, D. Kabiraj, D.K. Avasthi, K. P. Jain, Kapil U. Joshi, A.M. Narsale, D.C. Kothari

Surface and Coatings Technology · 2009 · 15 citations · 26 references

Concepts

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