Surface and Coatings Technology · 2009 · 15 citations · 26 references
Natural SciencesMaterials EngineeringMaterials ScienceSemiconductor MaterialsSurface ScienceThin FilmsChemical Vapor DepositionSemiconductor Thin FilmsSilicon MaterialsThin Film AnnealingThin Film Thermal PropertiesThin-film DepositionAnnealing EffectsAnnealing Temperature EffectsRapid Thermal AnnealingSilicon DioxideThermal Annealing
26
Yoshihiko Kanemitsu, Hiroshi Uto, Yasuaki Masumoto et al. · Physical review. B, Condensed matter · 1993 · 451 citations · Full text
Natural Sciences, Materials Engineering, Materials Science +17