Pulsed laser deposition of aluminum nitride thin films for FBAR applications - Concepedia

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Pulsed laser deposition of aluminum nitride thin films for FBAR applications

26

Citations

13

References

2007

Year

C. Cibert, Matthieu Chatras, C. Champeaux, D. Cros, A. Catherinot

Applied Surface Science

Materials ScienceAluminium NitrideAdvanced Laser ProcessingEngineeringApplied PhysicsLaser Processing TechnologyLaser DepositionLaser-assisted DepositionThin FilmsPulsed Laser DepositionFbar Applications

References

	Year	Citations

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