Publication | Closed Access
Non-reactively sputtered TiN and TiB2 films: influence of activation energy on film growth
92
Citations
18
References
1997
Year
Materials ScienceMaterials EngineeringMaterial AnalysisEngineeringNanotechnologySurface ScienceApplied PhysicsFilm GrowthTib2 FilmsThin FilmsChemical DepositionActivation EnergyChemical Vapor DepositionThin Film Processing
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