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Texturing of SiC-slurry and diamond wire sawn silicon wafers by HF–HNO3–H2SO4 mixtures

Materials EngineeringMaterials ScienceDiamond-like CarbonWafer Scale ProcessingEngineeringApplied PhysicsCarbideSemiconductor Device FabricationHf–hno3–h2so4 Mixtures