Publication | Closed Access
At-wavelength characterization of refractive x-ray lenses using a two-dimensional grating interferometer
48
Citations
19
References
2011
Year
EngineeringResidual AberrationsX-ray ImagingAt-wavelength CharacterizationOptical PropertiesX-ray TechnologyOptical SystemsInstrumentationRefractive X-ray LensesHealth SciencesSingle Parabolic BerylliumPhotonicsOphthalmologyX-ray Optics MetrologyOptical System AlignmentOptical ComponentsTwo-dimensional Grating InterferometerX-ray DiffractionOptical SciencesX-ray OpticDiffractive Optic
We report on the application of a two-dimensional hard x-ray grating interferometer to x-ray optics metrology. The interferometer is sensitive to refraction angles in two perpendicular directions with a precision of 10 nrad. It is used to observe the wavefront changes induced by a single parabolic beryllium focusing lens of large radius of curvature. The lens shape is reconstructed and its residual aberrations are analyzed. Its profile differs from an ideal parabolic shape by less than 2 μm or λ/50 at λ = 0.54 Å wavelength.
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