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Temperature-Dependent Resistivities in Silicon Inversion Layers at Low Temperatures
70
Citations
7
References
1980
Year
Materials ScienceSurface CharacterizationEngineeringPhysicsSurface-roughness ScatteringSurface ScienceApplied PhysicsCondensed Matter PhysicsTemperature-dependent ResistivitiesTemperature DependenceSurface AnalysisSemiconductor MaterialSemiconductor Device FabricationCoulomb ScatteringSilicon On InsulatorMicroelectronics
The temperature dependence of the resistivities of $n$-type silicon inversion layers at liquid helium temperatures was studied in detail. The temperature dependence was found to be correlated to the mobility of the sample. Our results can be explained by Coulomb scattering, with possible contributions by surface-roughness scattering in high-mobility samples.
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