Concepedia

Publication | Closed Access

Growth and properties of CVD-SiC layers using tetramethylsilane

DOI

24

Citations

6

References

1992

Year

António Figueras, S. Garelik, José Santiso, R. Rodrı́guez-Clemente, B. Armas, C. Combescure, R. Berjoan, J Saurel, R. Caplain
Materials Science and Engineering B

References

YearCitations

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