Oxygen plasma removal of thin polymer films

Abstract

Abstract Relative rates of polymer removal in an oxygen plasma have been measured for 40 polymer samples. The rates of removal are correlated, with structural factors which enhance or retard removal. Strong backbone bonds, aromatic and polar functional groups, and metallic atoms decrease the removal rates. Weak bonds not attached to the‐ polymer backbone have little affect while weak bonds attached directly to the chain or in the chain greatly accelerate removal. Chlorine present in the polymer catalyzes removal. This can be mimicked by mixtures of CF 4 , and O 2 for which much enhanced removal rates are observed.