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Particle Removal Efficiency Evaluation at 40 nm Using Haze Particle Standard

Seong Ho Yoo, Benjamin Y. H. Liu, James D. Sun, N. Narayanswami, Gregory P. Thomes

Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 2001 · 11 citations · 0 references

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