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Pulsed laser deposition of tungsten and tungsten oxide thin films with tailored structure at the nano- and mesoscale

Materials ScienceAdvanced Laser ProcessingEngineeringOxide ElectronicsSurface ScienceApplied PhysicsLaser DepositionLaser-assisted DepositionThin FilmsPulsed Laser DepositionChemical Vapor DepositionTailored Structure