Characteristics of DLC containing Ti and Zr films deposited by reactive magnetron sputtering

Abstract

Abstract The purpose of this paper is to investigate metal doping effects on micro-structural, mechanical and corrosive behavior of the DLC film. Ti and Zr doped DLC films were prepared on NiTi alloys by reactive magnetron sputtering combined with plasma source ion implantation (PSII) technology used to improve the coherent strength, respectively. The mechanical properties of the doped DLC films were investigated by means of nano-indentation technique, microscratch and frictional wear testing. The potentiodynamic polarization measurement was employed to value the corrosion resistance of DLC with Ti and Zr films in Hank's simulated body fluid. It was found that Ti-doped DLC films embraced higher nano-hardness, somewhat lower coefficient of friction and better corrosion resistance than Zr-doped DLC films.