Publication | Closed Access
Chemical and microstructural modifications in LiPON thin films exposed to atmospheric humidity
44
Citations
22
References
2011
Year
Materials ScienceAtmospheric HumidityChemical EngineeringEngineeringNanomaterialsMicrostructural ModificationsSurface ScienceSurface ModificationLipon Thin FilmsChemistryThin FilmsLipid ChemistryChemical Vapor DepositionThin Film Processing
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