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Influence of thermal treatment in N2 atmosphere on chemical, microstructural and optical properties of indium tin oxide and nitrogen doped indium tin oxide rf-sputtered thin films

Materials ScienceThermal TreatmentChemical EngineeringOptical MaterialsEngineeringSurface ScienceApplied PhysicsIndium Tin OxideRf-sputtered Thin FilmsThin FilmsPulsed Laser DepositionChemical Vapor DepositionThin Film Processing