Publication | Closed Access
Properties of amorphous SiO2 films prepared by reactive RF magnetron sputtering method
32
Citations
10
References
2002
Year
Materials EngineeringMaterials ScienceAmorphous Sio2 FilmsEngineeringOxide ElectronicsSilicon On InsulatorApplied PhysicsReactive Rf MagnetronThin FilmsAmorphous SolidMicroelectronicsThin Film Processing
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