Atomic scale analysis of the effect of the SiO2 passivation treatment on InAs/GaSb superlattice mesa sidewall

Abstract

We have analyzed by electron microscopy techniques the effect of the deposition of a SiO2 passivation layer on an InAs/GaSb type-II superlattice (SL) mesa with applications as a photodetector. Our images reveal good conformal coverage by the SiO2 upon an undulating edge of the SL mesa. However, we have observed scarce As clusters at the interface between the SL mesa and the passivation layer and some degree of oxidation of the mesa sidewall. The strong reduction in surface leakage currents demonstrates that the observed imperfections do not have a substantial detrimental effect on the passivation capabilities of the SiO2 layer.