Preparation and Photocatalytic Property of TiO<SUB>2</SUB> Columnar Nanostructure Films

Abstract

The rutile TiO2 films with columnar nanostructure were prepared by combining the glancing angle deposition (GLAD) technique in magnetron sputtering system with the subsequent two-step annealing treatment. Experimental results showed that all the TiO2 films kept discrete columnar structures as the Ti films deposited by GLAD and accomplished the phase transition from Ti to rutile TiO2. Such TiO2 films performed photocatalytic activity effectively and reusably towards methyl orange under UV light irradiation, which demonstrates the potential applications in wastewater treatment.