Thickness dependence of the dielectric properties of thermally evaporated Sb₂Te₃thin films

Abstract

structures have a capacitive configuration of effective area 6 mm 2 . Films were annelated at 373 K for 1h. A HP 4192A 5Hz-13MHz Lf Impedance Analyzer were used for the capacitance and dissipation factor measurements. The ohmic character of contacts were determined by applying front and reverse biases between bottom and top electrodes. For both of them, the resistance measurements gave same results These measurements were made in approximately 1,333x10 -3 Pa vacuum and were carried out in the temperature range 293-373 K.